Ultra High Purity Diaphragm Valve MPN:HM20-4VKLQ-M4

Manual Valve,2 Port UCV,1/4 in,Male Seal

• MATERIAL: UCV Series Valves meet the chemical composition and the mechanical properties of Stainless Steel 316L, according to the ASTM A276 specification. Chemical Composition: The body material of the UCV Series complies with SEMI F20 - the sulfur content is lower or equal to 0.01-percent.
• MECHANICAL SIZE - DIMENSIONAL SPECIFICATION: UCV Series Valves meet the end-to-end length and overall envelope and comply with SEMATECH Technology Transfer 96063137-ENG.
• PACKAGING: HAM-LET standard for packing the UCV Series Valves is a double bag. The inner bag contains ultra-pure nitrogen. All end fittings, threads and sealing surfaces are protected with a cap to prevent any damage.
• ELECTROPOLISHED SURFACES - SURFACE FINISH: UCV Valves meet a surface defect level of maximum of 25 for any location with a maximum average of 15. This test is done in accordance with SEMASPEC 90120401-STD. UCV Valves meet the Chromium Enhancement ratio of chromiumto-iron ratio of 2:1 and chromium oxide-to-iron oxide ratio of 3:1. This test is done in accordance with SEMASPEC 90120403-STD. UCV Valves meet the oxide layer depth and surface contamination of 20 angstroms after subtraction of the carbon layer. The carbon layer is 10-angstroms.
• SURFACE ROUGHNESS: All wetted parts of the UCV Series Valves have an average surface roughness (Ra avg) of 5 microinch Ra, and maximum surface roughness (Ra max) of 10 microinch Ra, complying with ISO 4288.
• HELIUM LEAK TEST: All UCV Series Valves are 100% helium leak tested. Helium-leak tests are performed using a helium-leak detector machine with a sensitivity of 0.1x10-10 atm cc He/sec. The standard leak-rate tests are listed below. (Lower leak rates are optional on request) Maximum Helium (He) leak ratings: Inboard leak integrity 3x10-11 atm cc/sec. Complies with SEMI F1. Leak across the seat 1x10-9 atm cc/sec. This test is done in accordance with SEMASPEC 90120391B-STD (held for at least 15-seconds).
• PARTICLES: The particles standard for UCV Series Valves is: less than 5-particles/ ft^3 for particles 0.1µm and 20 particles 0.02 µm for static and dynamic tests, according to SEMASPEC 90120390-STD.
• MOISTURE TESTING: The standard moisture level is 20 ppbv H20 in Nitrogen baseline or less, within 2 hours after 2 ppmv spike for 1 minute at flow rate of 1.5 SLM or less, according to SEMASPEC 90120397-STD.
• CLEANING: All CNC machined valve parts are cleaned to ensure that they are free of emulsion composition and residues involved in the machining process.
• RELIABILITY: The valves demonstrate a MTTF of more than 1 million cycles for pneumatic valves and more than 100,000 cycles for manual valves, in accordance with SEMASPEC 90120395-STD and 90120390-STD.

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